Title :
Microfabricated pressure sensing particles with integrated retroreflectors
Author :
Chalasani, S. ; Xie, Y. ; Mastrangelo, C.H.
Author_Institution :
Univ. of Utah, Salt Lake City, UT, USA
Abstract :
We report the microfabrication of engineered colorimetric pressure-sensing particles (PSPs) suitable for pressure measurements within microfluidic environments. Each 18-μm diameter particle consists of a semi-transparent elastic shell enclosing a compressible reference vacuum cavity. The flexible shell and compressible cavity form an optical resonator that determines its color. The particle color and corresponding pressure are interrogated optically using conventional white light microscopy. The particle shell includes a molded retroreflector that improves the angular readout efficiency. The particles exhibit a spectral shift pressure sensitivity of -19 nm/MPa with angular interrogation range >;15 deg.
Keywords :
colorimetry; microfluidics; microsensors; optical microscopy; optical resonators; pressure measurement; pressure sensors; retroreflectors; spectral line shift; PSP; angular readout efficiency; compressible cavity; compressible reference vacuum cavity; engineered colorimetric pressure-sensing particles; flexible shell cavity; integrated retroreflectors; microfabricated pressure sensing particles; microfabrication; microfluidic environments; molded retroreflector; optical resonator; particle color; particle shell; pressure measurements; semitransparent elastic shell; spectral shift pressure sensitivity; white light microscopy; Atmospheric measurements; Cavity resonators; Optical device fabrication; Optical imaging; Optical reflection; Optical sensors; Reflectivity;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734636
