Title :
2-DoF twisting electrothermal actuator for Scanning Laser Rangefinder application
Author :
Guo, Congzhong ; Fedder, Gary K.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
This paper reports the design, modeling and characterization of a 2-DoF twisting electrothermal (ET) actuator for reducing parasitic motion in the application of an SOI-CMOS-MEMS-based Scanning Laser Rangefinder (SLR). A schematic-based model was built using a hierarchical MEMS behavioral model library (NODAS) to develop the concept of independently actuating two parallel metal-polysilicon-oxide CMOS-MEMS vertical electrothermal actuators for scanning control. The small in-plane parasitic motion, which is essential for laser alignment, is less than 2 μm. The optical scanning range of 31° about the y-axis and 20° about the x-axis were obtained at 8.6 mW and 14.7 mW, respectively, with a small device footprint of 191 μm - 156 μm.
Keywords :
laser ranging; microactuators; microfabrication; micromirrors; 2-DoF twisting electrothermal actuator; hierarchical MEMS behavioral model library; optical scanning range; scanning laser rangefinder application; schematic-based model; Actuators; Laser beams; Laser modes; Micromechanical devices; Micromirrors; Temperature measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734648