• DocumentCode
    2771004
  • Title

    Impact of well edge proximity effect on timing

  • Author

    Kanamoto, T. ; Ogasahara, Yasuhiro ; Natsume, K. ; Yamaguchi, Kazuhiro ; Amishiro, H. ; Watanabe, Toshio

  • Author_Institution
    Renesas Technol. Corp., Hyogo
  • fYear
    2007
  • fDate
    11-13 Sept. 2007
  • Firstpage
    115
  • Lastpage
    118
  • Abstract
    This paper studies impact of the well edge proximity effect on digital circuit delay, based on model parameters extracted from test structures in an industrial 65 nm wafer process. The experimental results show that up to 10% of delay increase arises by the well edge proximity effect in the 65 nm technology, and it depends on interconnect length. Furthermore, due to asymmetric increase in pMOS and nMOS threshold voltages, delay may decrease in spite of the threshold voltage increase. From these results, we conclude that considering WPE is indispensable to cell characterization in the 65 nm technology.
  • Keywords
    CMOS digital integrated circuits; nanolithography; proximity effect (lithography); digital circuit delay; industrial 65 nm wafer process; nMOS threshold voltages; pMOS threshold voltages; wavelength 65 nm; well edge proximity effect; Circuit synthesis; Circuit testing; Delay effects; Doping; Electronic mail; Implants; MOSFETs; Proximity effect; Threshold voltage; Timing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Circuits Conference, 2007. ESSCIRC 2007. 33rd European
  • Conference_Location
    Munich
  • ISSN
    1930-8833
  • Print_ISBN
    978-1-4244-1125-2
  • Type

    conf

  • DOI
    10.1109/ESSCIRC.2007.4430259
  • Filename
    4430259