DocumentCode
2771004
Title
Impact of well edge proximity effect on timing
Author
Kanamoto, T. ; Ogasahara, Yasuhiro ; Natsume, K. ; Yamaguchi, Kazuhiro ; Amishiro, H. ; Watanabe, Toshio
Author_Institution
Renesas Technol. Corp., Hyogo
fYear
2007
fDate
11-13 Sept. 2007
Firstpage
115
Lastpage
118
Abstract
This paper studies impact of the well edge proximity effect on digital circuit delay, based on model parameters extracted from test structures in an industrial 65 nm wafer process. The experimental results show that up to 10% of delay increase arises by the well edge proximity effect in the 65 nm technology, and it depends on interconnect length. Furthermore, due to asymmetric increase in pMOS and nMOS threshold voltages, delay may decrease in spite of the threshold voltage increase. From these results, we conclude that considering WPE is indispensable to cell characterization in the 65 nm technology.
Keywords
CMOS digital integrated circuits; nanolithography; proximity effect (lithography); digital circuit delay; industrial 65 nm wafer process; nMOS threshold voltages; pMOS threshold voltages; wavelength 65 nm; well edge proximity effect; Circuit synthesis; Circuit testing; Delay effects; Doping; Electronic mail; Implants; MOSFETs; Proximity effect; Threshold voltage; Timing;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Circuits Conference, 2007. ESSCIRC 2007. 33rd European
Conference_Location
Munich
ISSN
1930-8833
Print_ISBN
978-1-4244-1125-2
Type
conf
DOI
10.1109/ESSCIRC.2007.4430259
Filename
4430259
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