Title :
The growth of BR-LED structures on a large MOCVD barrel reactor
Author :
Robinson, M.F. ; Dixon, J.E.
Abstract :
The authors use large twenty wafer barrel reactors for the MOCVD growth of GaAlAs-GaAs Bragg reflectors. The device characteristics of LED structures determined
Conference_Titel :
III-V Compound Semiconductor Materials Growth, IEE Colloquium on
Conference_Location :
London