A novel DFM cantilever with tuning function of resonant frequency for biomaterial imaging

Author

Hashimoto, Yoshihiko ; Hanasaki, Itsuo ; Isono, Yoshitada

Author_Institution

Grad. Sch. of Eng., Kobe Univ., Kobe, Japan

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

1217

Lastpage

1220

Abstract

We have developed a novel dynamic force microscope (DFM) cantilever with a function of tuning resonant frequency for measuring the topography of biomaterials with a single cantilever. We have integrated the electrostatic driving, clamping, and the lever motion amplification systems into the cantilever to change the cantilever length for varying the spring constant and resonant frequency. The resonant frequency is tunable in the range from 12 to 998 kHz, corresponding to the spring constant of 0.6 to 458 N/m. The system enables the imaging of biomolecule under a suitable condition by tuning the resonant frequency.

Keywords

atomic force microscopy; bioMEMS; biological techniques; cantilevers; electrostatic devices; microactuators; microfabrication; molecular biophysics; springs (mechanical); surface topography measurement; DFM cantilever; biomaterial imaging; biomaterial topography; biomolecule imaging; clamping; dynamic force microscope; electrostatic driving; frequency 12 kHz to 998 kHz; lever motion amplification systems; resonant frequency; spring constant; tuning function; Actuators; Electrostatics; Force; Resonant frequency; Springs; Surface topography; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734651

Filename

5734651