Title :
Low-power 3-bit piezoelectric MEMS analog to digital converter
Author :
Proie, Robert ; Skamp, Jeffrey S Puls ; Polcawich, Ronald G. ; Ivanov, Tony ; Zaghloul, Mona
Abstract :
This paper reports on a novel MEMS analog to digital converter (ADC) designed within a low-power, piezoelectric MEMS based digital logic process. The 3-bit ADC achieves full operation without the use of additional solid-state circuitry, allowing it to operate with minimal, 3.83 pW, static power dissipation. In addition, two piezoelectric property exploiting operational modes are presented. These increase the total effective number of bits and the system range without increasing the device area.
Keywords :
analogue-digital conversion; low-power electronics; micromechanical devices; piezoelectric devices; MEMS analog to digital converter; digital logic process; low-power piezoelectric MEMS; piezoelectric property; power 3.83 pW; solid-state circuitry; static power dissipation; word length 3 bit; Actuators; Analog-digital conversion; Conferences; Micromechanical devices; Power demand; Solid state circuits; Voltage measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734657
