Title :
Optimization of a completely decoupled flexure-based parallel XY micro-motion stage
Author :
Huang, Jiming ; Li, Yangmin ; Zhao, Xinhua
Author_Institution :
Dept. of Electromech. Eng., Univ. of Macau, Taipa, China
Abstract :
This paper presents a completely decoupled XY micro-motion stage which is a compliant parallel mechanism based on flexure hinges and driven by piezoelectric actuators (PZT). Simplified matrix method is employed to derive the compliance model. Then the workspace is analyzed by considering the output reduction of PZT, stress in the flexure hinges and buckling phenomenon. Finally, the stage dimensions are optimized using particle swarm optimization (PSO) algorithm in order to achieve maximum natural frequencies, and finite element analysis (FEA) is carried out to simulate the performance of the optimized stage. The FEA result indicates that the XY stage has an ideal decoupling property.
Keywords :
bending; buckling; compliance control; finite element analysis; hinges; manipulator kinematics; matrix algebra; micromanipulators; motion control; particle swarm optimisation; piezoelectric actuators; PZT output reduction; buckling phenomenon; completely decoupled flexure-based parallel XY micromotion stage; compliance model; compliant parallel mechanism; finite element analysis; flexure hinge stress; micromanipulator; natural frequency; particle swarm optimization; piezoelectric actuators; simplified matrix method; Equations; Fasteners; Joints; Kinematics; Mathematical model; Stress; Transmission line matrix methods;
Conference_Titel :
Mechatronics and Automation (ICMA), 2011 International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-8113-2
DOI :
10.1109/ICMA.2011.5985633
