Optimization of a completely decoupled flexure-based parallel XY micro-motion stage

Author

Huang, Jiming ; Li, Yangmin ; Zhao, Xinhua

Author_Institution

Dept. of Electromech. Eng., Univ. of Macau, Taipa, China

fYear

2011

fDate

7-10 Aug. 2011

Firstpage

69

Lastpage

74

Abstract

This paper presents a completely decoupled XY micro-motion stage which is a compliant parallel mechanism based on flexure hinges and driven by piezoelectric actuators (PZT). Simplified matrix method is employed to derive the compliance model. Then the workspace is analyzed by considering the output reduction of PZT, stress in the flexure hinges and buckling phenomenon. Finally, the stage dimensions are optimized using particle swarm optimization (PSO) algorithm in order to achieve maximum natural frequencies, and finite element analysis (FEA) is carried out to simulate the performance of the optimized stage. The FEA result indicates that the XY stage has an ideal decoupling property.

Keywords

bending; buckling; compliance control; finite element analysis; hinges; manipulator kinematics; matrix algebra; micromanipulators; motion control; particle swarm optimisation; piezoelectric actuators; PZT output reduction; buckling phenomenon; completely decoupled flexure-based parallel XY micromotion stage; compliance model; compliant parallel mechanism; finite element analysis; flexure hinge stress; micromanipulator; natural frequency; particle swarm optimization; piezoelectric actuators; simplified matrix method; Equations; Fasteners; Joints; Kinematics; Mathematical model; Stress; Transmission line matrix methods;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation (ICMA), 2011 International Conference on

Conference_Location

Beijing

ISSN

2152-7431

Print_ISBN

978-1-4244-8113-2

Type

conf

DOI

10.1109/ICMA.2011.5985633

Filename

5985633