DocumentCode
2771511
Title
Nanostructured c-post wicks for advanced heat pipes
Author
Nam, Y.S. ; Sharratt, S. ; Ju, Y.S.
Author_Institution
Univ. of California, Los Angeles, CA, USA
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
1313
Lastpage
1316
Abstract
Micro-heat pipes incorporating advanced wicks are promising for the thermal management of high power density semiconductor and MEMS devices. We report experimental characterization of the heat transfer performance of wicks consisting of dense arrays of superhydrophilic Cu micropost wicks fabricated using electrochemical deposition and controlled chemical oxidation. A very high heat removal capability (as high as 800 W/cm2 with less than 35°C wick superheat) is demonstrated using 2×2 mm2 thin-film heaters as heat sources. Superhydrophilic CuO nanostructures integrated onto the micropost surfaces are shown to enhance the critical heat flux by as much as 70%.
Keywords
coating techniques; heat pipes; heat transfer; hydrophilicity; micromechanical devices; nanostructured materials; oxidation; semiconductor device packaging; thermal management (packaging); Cu; MEMS devices; advanced heat pipes; controlled chemical oxidation; electrochemical deposition; heat flux; high power density semiconductor; high-power density semiconductor devices; nanostructured copper micropost wicks; superhydrophilic nanostructures; temperature 35 C; thermal management; Copper; Heat transfer; Heating; Performance evaluation; Resistance; Solids; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2011.5734675
Filename
5734675
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