Title :
Nanostructured c-post wicks for advanced heat pipes
Author :
Nam, Y.S. ; Sharratt, S. ; Ju, Y.S.
Author_Institution :
Univ. of California, Los Angeles, CA, USA
Abstract :
Micro-heat pipes incorporating advanced wicks are promising for the thermal management of high power density semiconductor and MEMS devices. We report experimental characterization of the heat transfer performance of wicks consisting of dense arrays of superhydrophilic Cu micropost wicks fabricated using electrochemical deposition and controlled chemical oxidation. A very high heat removal capability (as high as 800 W/cm2 with less than 35°C wick superheat) is demonstrated using 2×2 mm2 thin-film heaters as heat sources. Superhydrophilic CuO nanostructures integrated onto the micropost surfaces are shown to enhance the critical heat flux by as much as 70%.
Keywords :
coating techniques; heat pipes; heat transfer; hydrophilicity; micromechanical devices; nanostructured materials; oxidation; semiconductor device packaging; thermal management (packaging); Cu; MEMS devices; advanced heat pipes; controlled chemical oxidation; electrochemical deposition; heat flux; high power density semiconductor; high-power density semiconductor devices; nanostructured copper micropost wicks; superhydrophilic nanostructures; temperature 35 C; thermal management; Copper; Heat transfer; Heating; Performance evaluation; Resistance; Solids; Temperature measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2011.5734675