Micro/nano displacement measurements using a novel contact probe-based FBG sensing system

The micro/nano displacement measurement in modern precision machining is important issue for industrial applications. A high-precision and low-cost Micro/nano displacement measuring system is under development. In order to enhance the measuring accuracy, some new ideas are integrated into the design, such as the suspended FBG probe stem and microball tip to enlarge the attainable aspect ratio, applied filtering technology both in hardware and software to suppress the noises. In this work, matched grating method used in signal demodulation is beneficial to simplify system structure and lower the cost of manufacture. The critical design technique of the developed micro/nano displacement measuring system is de-scribed in this report. It has been proved by preliminary experimental results that the measuring system resolution can reach 50nm in a range of 30um, using the linear nanopositioner stage with a displacement resolution of 5 nm.