DocumentCode
2771712
Title
Nano-electromechanical zero-dimensional freestanding nanogap actuator
Author
Han, Jun Hyun ; Yoshimizu, Norimasa ; Cheng, Tiffany ; Ziwisky, Michael ; Bhave, Sunil A. ; Lal, Amit ; Lee, Chung Hoon
Author_Institution
Marquette Univ., Milwaukee, WI, USA
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
1357
Lastpage
1360
Abstract
Micromachined free standing nanogap with metal electrodes is presented. The gap size is as small as 17 nm, and can be reduced further with electrostatic or piezoelectric actuation. The nanoscale gap is fabricated by industrial standard optical lithography and anisotropic wet chemical Si etching. Electron transport between the metal electrodes with optical stimulus enhancing photon-electron coupling (plasmon) is presented.
Keywords
electrodes; etching; microactuators; nanoelectromechanical devices; piezoelectric devices; anisotropic wet chemical Si etching; electron transport; electrostatic actuation; industrial standard optical lithography; metal electrode; nanoelectromechanical actuator; nanoscale gap; photon-electron coupling; piezoelectric actuation; zero-dimensional freestanding nanogap actuator; Metals; Nanobioscience; Nanoscale devices; Optical device fabrication; Optical sensors; Silicon; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734686
Filename
5734686
Link To Document