Title :
Nano-electromechanical zero-dimensional freestanding nanogap actuator
Author :
Han, Jun Hyun ; Yoshimizu, Norimasa ; Cheng, Tiffany ; Ziwisky, Michael ; Bhave, Sunil A. ; Lal, Amit ; Lee, Chung Hoon
Author_Institution :
Marquette Univ., Milwaukee, WI, USA
Abstract :
Micromachined free standing nanogap with metal electrodes is presented. The gap size is as small as 17 nm, and can be reduced further with electrostatic or piezoelectric actuation. The nanoscale gap is fabricated by industrial standard optical lithography and anisotropic wet chemical Si etching. Electron transport between the metal electrodes with optical stimulus enhancing photon-electron coupling (plasmon) is presented.
Keywords :
electrodes; etching; microactuators; nanoelectromechanical devices; piezoelectric devices; anisotropic wet chemical Si etching; electron transport; electrostatic actuation; industrial standard optical lithography; metal electrode; nanoelectromechanical actuator; nanoscale gap; photon-electron coupling; piezoelectric actuation; zero-dimensional freestanding nanogap actuator; Metals; Nanobioscience; Nanoscale devices; Optical device fabrication; Optical sensors; Silicon; Tunneling;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734686
