Title :
Towards automated AFM-based nanomanipulation in a combined nanorobotic AFM/HRSEM/FIB system
Author :
Bartenwerfer, M. ; Fatikow, S. ; Tunnell, R. ; Mick, U. ; Stolle, C. ; Diederichs, C. ; Jasper, D. ; Eichhorn, V.
Author_Institution :
Div. Microrobotics & Control Eng., Univ. of Oldenburg, Oldenburg, Germany
Abstract :
In this paper, the semi-automated AFM-based nanomanipulation of silica spheres with a radius of 550 nm is presented. A combined AFM/HRSEM/FIB system is used to facilitate the SEM vision-based pick-and-place handling with haptic feedback. Object recognition and tracking algorithms are described supporting the automated localization of micro-and nanospheres. Automated alignment of source and target sample positions is realized to support fast exchange of different substrates and to speed up the pick-and-place procedure. The integration of a haptic feedback device allows for intuitive AFM-based nanomanipulation with force feedback. The silica spheres are assembled into 2 × 2 μm arrays for applications in infrared spectroscopy.
Keywords :
atomic force microscopy; focused ion beam technology; industrial manipulators; materials handling; micromanipulators; object recognition; robot vision; scanning electron microscopes; AFM-HRSEM-FIB system; AFM-based nanomanipulation; SEM vision-based pick-and-place handling; atomic force microscope; focused ion beam; haptic feedback; high-resolution scanning electron microscope; object recognition; object tracking; silica sphere; size 550 nm; Force; Force feedback; Nanoscale devices; Probes; Scanning electron microscopy; Silicon compounds;
Conference_Titel :
Mechatronics and Automation (ICMA), 2011 International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-8113-2
DOI :
10.1109/ICMA.2011.5985651
