An 8" Fab Startup: Motorola MOS 11

Author

Nesbit, Wayne

Author_Institution

Motorola, Inc.

fYear

1993

fDate

20-21 Sept. 1993

Keywords

History; Investments; Microprocessors; Production facilities; Semiconductor device manufacture; Springs; Ultra large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 1993. International Symposium on

Conference_Location

Austin, TX, USA

Type

DOI

10.1109/ISSM.1993.670291

Filename

670291

Link To Document