Title :
Bulk acoustic wave microwave composite resonators and filters with acoustic isolation of resonating layers
Author :
Mansfeld, G.D. ; Alekseev, S.G. ; Kotelyanskii, I.M.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Abstract :
The problem of acoustic isolation of thin-film piezoelectric resonators and filters for microwaves is developed. Expressions describing operation of such devices taking into account losses in all the layers are derived. The conclusions are supported by numerical examples
Keywords :
acoustic filters; acoustic microwave devices; acoustic resonators; bulk acoustic wave devices; crystal resonators; microwave filters; acoustic isolation; bulk acoustic wave composite resonator; loss; microwave filter; thin film piezoelectric resonator; Acoustic devices; Acoustic waves; Bulk acoustic wave devices; Electrodes; Microwave devices; Microwave filters; Piezoelectric films; Resonator filters; Substrates; Surface impedance;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762302
