• DocumentCode
    2773090
  • Title

    Effects of annealing condition on thermal sensing characteristics of Ba1-xSrxTiO3 thin-film resistor

  • Author

    Liu, Y.R. ; Lai, P.T. ; Li, B. ; Li, G.Q. ; Huang, M.Q.

  • Author_Institution
    Dept. of Appl. Phys., South China Univ. of Technol., Guangzhou, China
  • fYear
    2003
  • fDate
    16-18 Dec. 2003
  • Firstpage
    423
  • Lastpage
    426
  • Abstract
    Barium strontium titanate (Ba1-xSrxTiO3) thin-film resistor is fabricated on a SiO2/Si substrate by argon ion-beam sputtering technique. Thermal sensitivity characteristics of the resistor are investigated, and the results show that the thin-film resistor has good thermal sensitivity with negative temperature coefficient. Moreover, the effects of annealing condition on thermal sensing properties of the resistor are studied.
  • Keywords
    annealing; barium compounds; ferroelectric materials; ferroelectric thin films; sensitivity; sputter deposition; strontium compounds; temperature sensors; thin film resistors; Ba1-xSrxTiO3; Ba1-xSrxTiO3 thin-film resistor; SiO2-Si; SiO2-Si substrate; annealing; argon ion-beam sputtering; negative temperature coefficient; thermal sensing; thermal sensitivity; Annealing; Argon; Barium; Resistors; Semiconductor thin films; Sputtering; Strontium; Substrates; Thermal resistance; Titanium compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Solid-State Circuits, 2003 IEEE Conference on
  • Print_ISBN
    0-7803-7749-4
  • Type

    conf

  • DOI
    10.1109/EDSSC.2003.1283564
  • Filename
    1283564
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2773090