DocumentCode
2773108
Title
Meeting The Competitive Challenge
Author
Spencer, William J.
Author_Institution
Sematech
fYear
1993
fDate
20-21 Sept. 1993
Keywords
Costs; Electronics industry; Lithography; Marketing and sales; Metrology; Optical device fabrication; Plasma applications; Printers; Resists; Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location
Austin, TX, USA
Type
conf
DOI
10.1109/ISSM.1993.670294
Filename
670294
Link To Document