Title :
Meeting The Competitive Challenge
Author :
Spencer, William J.
Author_Institution :
Sematech
Keywords :
Costs; Electronics industry; Lithography; Marketing and sales; Metrology; Optical device fabrication; Plasma applications; Printers; Resists; Semiconductor device manufacture;
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
DOI :
10.1109/ISSM.1993.670294