DocumentCode
2773676
Title
The Comparison Of Response Surface And Taguchi Methods For Multiple-response Optimization Using Simulation
Author
Jones, Ken ; Johnson, Mark ; Liou, J.J.
Author_Institution
Harris Semiconductor Mel~ourne, Florida 32902-0883
fYear
1992
fDate
28-30 Sep 1992
Firstpage
15
Lastpage
18
Keywords
Application software; Boron; Design for manufacture; Implants; Manufacturing processes; Optimization methods; Oxidation; Response surface methodology; Robustness; Semiconductor device noise;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International
Print_ISBN
0-7803-0755-0
Type
conf
DOI
10.1109/IEMT.1992.639855
Filename
639855
Link To Document