DocumentCode

2774313

Title

Cost Of Ownership

Author

Robertson, Frank

Author_Institution

Sematech

fYear

1993

fDate

20-21 Sept. 1993

Keywords

Costs; Fabrication; Production; Productivity; Rapid thermal processing; Semiconductor device modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 1993. International Symposium on

Conference_Location

Austin, TX, USA

Type

conf

DOI

10.1109/ISSM.1993.670300

Filename

670300