• DocumentCode
    2774499
  • Title

    Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al2O3

  • Author

    Ay, F. ; Bradley, J.D.B. ; Wörhoff, K. ; de Ridder, R.M. ; Pollnau, M.

  • Author_Institution
    Integrated Opt. Microsyst. (IOMS) Group, Univ. of Twente, Enschede, Netherlands
  • fYear
    2009
  • fDate
    14-19 June 2009
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.
  • Keywords
    aluminium compounds; focused ion beam technology; milling; nanopatterning; nanostructured materials; Al2O3; focused ion beam milling; focused ion beam nanostructured integrated Fabry-Perot microcavities; material system; optical performance investigation; well-controlled nanometer-size feature definition; Fabry-Perot; Fluorescence; Frequency; Integrated optics; Ion beams; Laser excitation; Laser transitions; Microcavities; Particle beam optics; Spectroscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
  • Conference_Location
    Munich
  • Print_ISBN
    978-1-4244-4079-5
  • Electronic_ISBN
    978-1-4244-4080-1
  • Type

    conf

  • DOI
    10.1109/CLEOE-EQEC.2009.5191501
  • Filename
    5191501
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2774499