A reflectance spectroscopy-based tool for high-speed characterization of silicon wafers and solar cells in commercial production

Some new applications of reflectance spectroscopy using the GT FabScan are described, which make this system highly desirable for process monitoring in commercial Si solar cell fabrication. These applications include grain orientation, grain size distribution, dislocation density distribution, and antireflection coating thickness on a finished solar cell. These measurements are performed very fast, typically in less than 10 ms over the entire wafer.