Title :
ISSM Equipment Standardization Panel
Author :
Harbison, Dale R.
Author_Institution :
Texas Instruments Incorporated
Keywords :
Cost function; Instruments; Investments; Machinery production industries; Paper technology; Productivity; Pulp manufacturing; Robots; Standardization; Turning;
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
DOI :
10.1109/ISSM.1993.670302