Title :
The Competitive Semiconductor Manufacturing Survey
Author :
Leachman, Robert C.
Author_Institution :
University of California at Berkeley
Keywords :
Best practices; Educational institutions; Fabrication; Lead compounds; Production facilities; Semiconductor device manufacture;
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
DOI :
10.1109/ISSM.1993.670310
