• DocumentCode
    2776561
  • Title

    Ultraclean Technology: Gas Delivery Issues In The Submicron Realm

  • Author

    Kobayashi, Hisayoshi

  • Author_Institution
    Ultra Clean Technology Systems and Service, Inc.
  • fYear
    1993
  • fDate
    20-21 Sept. 1993
  • Keywords
    Degradation; Fabrication; Gases; Geometry; Impurities; Maintenance; Manufacturing; Moisture; Semiconductor device manufacture; Surface contamination;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 1993. International Symposium on
  • Conference_Location
    Austin, TX, USA
  • Type

    conf

  • DOI
    10.1109/ISSM.1993.670311
  • Filename
    670311
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2776561