Title :
Multilayer nanogranular thin films as the materials for magnetic microinductors
Author :
Urse, M. ; Chiriac, H. ; Grigoras, M. ; Tibu, M.
Author_Institution :
National Inst. of R&D for Tech. Phys., Iasi, Romania
Abstract :
Some results concerning the magnetic, electrical and microstructural properties of multilayer [FeCoBN/Si3N4]xn films in view of their utilization for manufacturing thin film magnetic microinductors, are presented. A comparison between the physical properties of FeCoBN and [FeCoBN/Si3N4]xn films is also reported The [FeCoBN/Si3N4]xn thin films with the thickness of the FeCoBN layers varied from 10 to 30 nm, exhibit good soft magnetic characteristics and high values for electrical resistivity such as Ms of 172 - 185 emu/g, Hc of 4 - 18 Oe and ρ of 820 - 480 μΩ-cm, respectively. These physical properties of the samples are discussed in relation with the microstructure of the multilayer system.
Keywords :
boron alloys; cobalt alloys; coercive force; electrical resistivity; inductors; iron alloys; magnetic multilayers; magnetic thin films; nanostructured materials; silicon compounds; soft magnetic materials; 10 to 30 nm; FeCoBN-Si3N4; electrical properties; electrical resistivity; magnetic microinductor; magnetic properties; microstructural properties; multilayer; nanogranular thin film; physical properties; soft magnetic characteristics; Electric resistance; Magnetic films; Magnetic materials; Magnetic multilayers; Magnetic properties; Manufacturing; Micromagnetics; Semiconductor films; Semiconductor thin films; Soft magnetic materials;
Conference_Titel :
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN :
0-7803-9214-0
DOI :
10.1109/SMICND.2005.1558717
