Title :
Planning And Scheduling For A Technology Development Fab
Author :
Wenstrand, John S.
Author_Institution :
Hewlett-Packard Company
Keywords :
Capacity planning; Companies; Fabrication; Inspection; Integrated circuit technology; Optimized production technology; Process planning; Scheduling algorithm; Technology planning; Throughput;
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
DOI :
10.1109/ISSM.1993.670317