DocumentCode :
2777742
Title :
Planning And Scheduling For A Technology Development Fab
Author :
Wenstrand, John S.
Author_Institution :
Hewlett-Packard Company
fYear :
1993
fDate :
20-21 Sept. 1993
Keywords :
Capacity planning; Companies; Fabrication; Inspection; Integrated circuit technology; Optimized production technology; Process planning; Scheduling algorithm; Technology planning; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
Type :
conf
DOI :
10.1109/ISSM.1993.670317
Filename :
670317
Link To Document :
بازگشت