DocumentCode :
2777813
Title :
Analysis Of Cluster Tool Performance In Semiconductor Manufacturing
Author :
Mauer, John L. ; Schelasin, Roland E A ; Miller, Peter J.
Author_Institution :
Thomas J Watson Research Center
fYear :
1992
fDate :
28-30 Sep 1992
Firstpage :
129
Lastpage :
134
Keywords :
Parallel processing; Parallel robots; Performance analysis; Process planning; Production facilities; Productivity; Random access memory; Semiconductor device manufacture; Throughput; Wet etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International
Print_ISBN :
0-7803-0755-0
Type :
conf
DOI :
10.1109/IEMT.1992.639876
Filename :
639876
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2777813
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