DocumentCode :
2777939
Title :
The Influence Of Equipment Layout On Fab Productivity
Author :
Slarna, M.
Author_Institution :
Fairchild Research Center
fYear :
1993
fDate :
20-21 Sept. 1993
Keywords :
Biological materials; Cellular manufacturing; Continuous production; Implants; Lean production; Modems; Productivity; Research and development; Semiconductor device manufacture; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
Type :
conf
DOI :
10.1109/ISSM.1993.670318
Filename :
670318
Link To Document :
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