Title :
The Influence Of Equipment Layout On Fab Productivity
Author_Institution :
Fairchild Research Center
Keywords :
Biological materials; Cellular manufacturing; Continuous production; Implants; Lean production; Modems; Productivity; Research and development; Semiconductor device manufacture; Transistors;
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
DOI :
10.1109/ISSM.1993.670318