DocumentCode :
2777974
Title :
Automated Preventive Maintenance Of Plasma Etch Systems With The Secs Protocol
Author :
Byrne, P.P. ; Youlton, D.S. ; Heiman, K.R. ; Miller, A.
Author_Institution :
Brookside Software
fYear :
1992
fDate :
28-30 Sep 1992
Firstpage :
135
Lastpage :
137
Keywords :
Etching; Fabrication; Job shop scheduling; Plasma applications; Preventive maintenance; Production; Protocols; Semiconductor device manufacture; Software performance; System performance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International
Print_ISBN :
0-7803-0755-0
Type :
conf
DOI :
10.1109/IEMT.1992.639877
Filename :
639877
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2777974
بازگشت