Title :
Integration of CNT with TIA into gas sensors
Author :
Huang, Jung-Tang ; Yang, Yao-Yi ; Lu, Shey-Shi ; Tsai, Cheng-Hung ; Lin, Liang-Tse ; Yang, Chiu-Chin
Author_Institution :
Nat. Taipei Univ. of Technol., Taipei
Abstract :
This paper explores the use of single-walled carbon nanotubes (SWCNTs) as a gas sensor for detecting organic gas molecules. A low-temperature dielectrophoresis (DEP) method is employed to combine CNTs with Transimpedance Amplifier (TIA) based on UMC 0.18 um 1P6M CMOS process into a nanosensor device.
Keywords :
amplifiers; carbon nanotubes; electrophoresis; gas sensors; nanotube devices; C; CMOS process; gas sensor; low-temperature dielectrophoresis; nanosensor device; organic gas molecules; single-walled carbon nanotubes; transimpedance amplifier; Atomic force microscopy; Biosensors; Carbon nanotubes; Circuits; Dielectrophoresis; Electrodes; Fabrication; Gas detectors; Nanoscale devices; Temperature sensors;
Conference_Titel :
Electronic Materials and Packaging, 2006. EMAP 2006. International Conference on
Conference_Location :
Kowloon
Print_ISBN :
978-1-4244-0834-4
Electronic_ISBN :
978-1-4244-0834-4
DOI :
10.1109/EMAP.2006.4430660
