• DocumentCode
    277803
  • Title

    Nonuniformities in the air-sweeping of quartz

  • Author

    Gualtieri, J. ; Kosinski, J. ; Murray, R.A.

  • Author_Institution
    US Army Electron. Technol. & Devices Lab., Fort Monmouth, NJ, USA
  • fYear
    1990
  • fDate
    23-25 May 1990
  • Firstpage
    228
  • Lastpage
    237
  • Abstract
    The mechanism for electrode void formation before and during sweeping that leads to nonuniform H-sweeping is discussed. The conditions that restrict H-introduction and allow nonuniformities to develop are described. The techniques and electrode types available to circumvent the restriction of uniform hydrogen indiffusion are presented. Experimental methods and observations are discussed. It is found that stress-induced voiding of evaporated metal electrodes normally provides openings (electrode-quartz-water vapor regions) that allow the indiffusion of hydrogen for sweeping. The voiding is influenced by metal particle size and the application of compressive stresses. Since the extensive stress-induced voiding necessary for uniform sweeping is difficult to control, sufficient open electrode regions can be created artificially to ensure uniform H-sweeping. Uniform H-sweeping can be achieved by using conducting oxide electrodes that permit the diffusion of hydrogen without the need for electrode porosity
  • Keywords
    crystal resonators; quartz; H diffusion; SiO2; air-sweeping of quartz; compressive stresses; conducting oxide electrodes; electrode types; electrode void formation; evaporated metal electrodes; metal particle size; nonuniform H-sweeping; nonuniformities; observations; open electrode regions; stress-induced voiding; uniform H-sweeping; Aluminum; Anodes; Bars; Chromium; Electrodes; Electromagnetic wave absorption; Etching; Gold; Hydrogen; Laboratories;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control, 1990., Proceedings of the 44th Annual Symposium on
  • Conference_Location
    Baltimore, MD
  • Type

    conf

  • DOI
    10.1109/FREQ.1990.177502
  • Filename
    177502