Title :
Tri-state multi-contact lateral MEMS relay with high mechanical reliability
Author :
Yamada, Shohei ; Ishikawa, Kenji ; Yu, Qiang ; Ramadoss, Ramesh ; Almeida, Lia
Author_Institution :
Yokohama Nat. Univ., Yokohama
Abstract :
The article consists of a Powerpoint presentation on a new tri-state multi contact lateral MEMS relay which has high mechanical reliability through elimination of mechanical design tradeoffs. The paper concludes that the FEM simulations showed that the tri-state multi contact lateral MEMS relay has high reliability and the testing results showed that the tri-state multi contact lateral MEMS relay has more stable switching actuation without stiction failure compared with mono-state single-contact MEMS relay.
Keywords :
finite element analysis; microrelays; reliability; FEM simulation; mechanical design tradeoffs; mechanical reliability; stiction failure; switching actuation; tri-state multicontact lateral MEMS relay; Contacts; Electrodes; Insertion loss; Micromechanical devices; Propagation losses; Radar applications; Radio frequency; Relays; Switches; Thermal force;
Conference_Titel :
Electronic Materials and Packaging, 2006. EMAP 2006. International Conference on
Conference_Location :
Kowloon
Print_ISBN :
978-1-4244-0833-7
Electronic_ISBN :
978-1-4244-0834-4
DOI :
10.1109/EMAP.2006.4430669
