DocumentCode
2778183
Title
Silicon Micro-mechanics For Solid State Sensors
Author
Haviland, Jeffrey S.
Author_Institution
Honeywell, Inc.
fYear
1992
fDate
28-30 Sep 1992
Firstpage
138
Lastpage
144
Keywords
Chemical sensors; Hall effect; Integrated circuit packaging; Intelligent sensors; Magnetic field measurement; Magnetic sensors; Mechanical sensors; Optical sensors; Silicon; Solid state circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International
Print_ISBN
0-7803-0755-0
Type
conf
DOI
10.1109/IEMT.1992.639878
Filename
639878
Link To Document