Title :
High efficiency 400 dpi AlGaAs LED array fabrication for PMS (polygon mirror scanning)
Author :
Kim, In Hoe ; Park, Kwang Bum ; Moon, Hyun Chan
Author_Institution :
Electron. Devices Res. Centre, Korea Electron Technol. Inst., Pyungtaek, South Korea
Abstract :
A PMS consists of LED array, lens, polygon-mirror, and motor. A PMS´s light sources is the linear LED array. We have fabricated a 400 dpi LED array using GaAs/AlGaAs (Al~0.65) single heterojunction structure. Problems of AlGaAs LED arrays are among the emitters. Thus, we have performed isolation by RIE and wet etching. RIE experiments were carried out at room temperature and used a mixture of gases under a variety of etching conditions. The n and p ohmic contacts were made with AuGe/Ni/Au and AuZn/Pd/Au, respectively. The AlGaAs LED array showed good quality with low forward turn-on voltages and high brightness
Keywords :
III-V semiconductors; LED displays; aluminium compounds; brightness; etching; gallium arsenide; isolation technology; mirrors; ohmic contacts; sputter etching; AlGaAs; AuGe-Ni-Au; AuZn-Pd-Au; GaAs-AlGaAs; LED array fabrication; RIE; high brightness; high efficiency; isolation; linear LED array; low forward turn-on voltages; low power consumption; ohmic contacts; polygon mirror scanning; single heterojunction structure; virtual displays; wet etching; Fabrication; Gallium arsenide; Gold; Heterojunctions; Lenses; Light emitting diodes; Light sources; Optical arrays; Temperature; Wet etching;
Conference_Titel :
Information Display, 1999. ASID '99. Proceedings of the 5th Asian Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
957-97347-9-8
DOI :
10.1109/ASID.1999.762735
