DocumentCode
2780021
Title
Controlling patterning of polymeric surfaces during flexible fabrication with excimer laser
Author
Mocanu, Elena ; Sterian, P.
Author_Institution
Univ. Center for Opt. Eng. & Photonics, Bucharest Polytech. Univ., Bucharest, Romania
fYear
2009
fDate
14-19 June 2009
Firstpage
1
Lastpage
1
Abstract
In this paper we present results obtained with a ComPEX 205 KrF laser and an optical system that assures a working precision of 1mum. Our main research area is the improving the parameters of microfabrication of the polymers used in the new generation of microelectronics. We try to obtain better results by understanding the chemical mechanism of laser-polymer interaction.
Keywords
excimer lasers; laser materials processing; microfabrication; polymers; ComPEX 205 KrF laser; excimer laser; microelectronics; microfabrication; patterning; polymeric surfaces; Electromagnetic scattering; Metamaterials; Microwave antenna arrays; Optical arrays; Optical control; Optical device fabrication; Polymers; Q factor; Resonance; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location
Munich
Print_ISBN
978-1-4244-4079-5
Electronic_ISBN
978-1-4244-4080-1
Type
conf
DOI
10.1109/CLEOE-EQEC.2009.5191777
Filename
5191777
Link To Document