Title :
Accurate electrical measurement of coupled lines on lossy silicon
Author :
Arz, Uwe ; Williams, Dylan F. ; Walker, David K. ; Grabinski, Hartmut
Author_Institution :
Lab. for Inf. Technol., Hannover Univ., Germany
Abstract :
In this paper, we apply a measurement method designed for asymmetric coupled lines to determine the broadband propagation characteristics of symmetric coupled lines fabricated on a highly conductive silicon substrate. We show that the matrices of frequency-dependent propagation constants and characteristic impedances, as extracted from calibrated four-port S-parameter measurements, agree very well with data predicted by numerical calculations
Keywords :
S-parameters; coupled transmission lines; electric impedance; elemental semiconductors; integrated circuit interconnections; integrated circuit measurement; integrated circuit metallisation; numerical analysis; silicon; Si; asymmetric coupled lines; broadband propagation characteristics; calibrated four-port S-parameter measurements; characteristic impedance matrices; conductive silicon substrate; coupled lines; electrical measurement; frequency-dependent propagation constant matrices; lossy silicon; numerical calculations; symmetric coupled lines; Conductivity measurement; Couplings; Design methodology; Electric variables measurement; Frequency; Impedance; Loss measurement; Propagation constant; Silicon; Symmetric matrices;
Conference_Titel :
Electrical Performance of Electronic Packaging, 2000, IEEE Conference on.
Conference_Location :
Scottsdale, AZ
Print_ISBN :
0-7803-6450-3
DOI :
10.1109/EPEP.2000.895523
