Construction of an ultra-micro manipulation system based on visual control -realization of nano-hand-eye system

Author

Miyazaki, Hideki ; Kameya, Takayuki ; Sato, Tomomasa ; Hatamura, Yotaro ; Morishita, Hiroshi

Author_Institution

Res. Center for Adv. Sci. & Technol., Tokyo Univ., Japan

fYear

1994

fDate

6-10 Nov. 1994

Firstpage

74

Lastpage

77

Abstract

In this paper, we propose an automatic ultramicro manipulation system equipped with visual feedback function, the nano-hand-eye system, and emphasize the necessity of the visual control to execute tasks in the ultramicro world. The constructed nano-hand-eye system proves its effectiveness through the scratching task of a thin line with uniform width in the desired direction.<>

Keywords

electron microscopy; image processing; manipulators; micromechanical devices; position control; real-time systems; scanning electron microscopes; automatic ultramicro manipulation system; nano-hand-eye system; position control; real time image processing; scanning electron microscope; scratching task; visual control; visual feedback; Accidents; Automatic control; Control systems; Feedback control; Force sensors; Humans; Microscopy; Nanobioscience; Physics; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Emerging Technologies and Factory Automation, 1994. ETFA '94., IEEE Symposium on

Conference_Location

Tokyo, Japan

Print_ISBN

0-7803-2114-6

Type

conf

DOI

10.1109/ETFA.1994.402020

Filename

402020