Fabrication of a bolometric infrared micro-spectrometer

The bolometric infrared spectrometer instantaneously detects the incoming IR spectra by detecting the decrease or increase of bolometer resistance due to its temperature change caused by the incident infrared light. In this paper, the design and fabrication methods of bolometric IR spectrometer are presented. The IR spectrometer reported in this paper consists of a bolometric IR detector array made of V₂O₅ and a grating structure used for separating incident infrared light depending on its wavelength.