• DocumentCode
    2781233
  • Title

    Effects of shear strain on the conduction band in silicon: An efficient two-band k·p theory

  • Author

    Sverdlov, Viktor ; Ungersboeck, Enzo ; Kosina, Hans ; Selberherr, Siegfried

  • Author_Institution
    Tech. Univ. Wien, Vienna
  • fYear
    2007
  • fDate
    11-13 Sept. 2007
  • Firstpage
    386
  • Lastpage
    389
  • Abstract
    We present an efficient two-band kldrp theory which accurately describes the six lowest conduction band valleys in silicon. By comparing the model with full band pseudo-potential calculations we demonstrate that the model captures both the nonparabolicity effects and the stress-induced band structure modification for general stress conditions. It reproduces the stress dependence of the effective masses and the nonparabolicity parameter. Analytical expressions for the valley shifts and the transversal and longitudinal effective mass modifications induced by uniaxial [110] stress are obtained and analyzed. The low-field mobility enhancement in the direction of tensile [110] stress in {001} SOI FETs with arbitrary small body thickness is due to a modification of the conductivity mass and is shown to be partly hampered by an increase in nonparabolicity at high stress value.
  • Keywords
    conduction bands; elemental semiconductors; field effect transistors; k.p calculations; silicon; silicon-on-insulator; stress effects; SOI FET; Si; conduction band; general stress conditions; longitudinal effective mass modifications; low-field mobility enhancement; nonparabolicity effects; shear strain; silicon; stress-induced band structure modification; tensile stress; transversal effective mass modifications; two-band kldrp theory; uniaxial stress; valley shifts; Brillouin scattering; CMOS process; Capacitive sensors; Conductivity; Effective mass; Electron mobility; FETs; Mass production; Silicon; Tensile stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 2007. ESSDERC 2007. 37th European
  • Conference_Location
    Munich
  • ISSN
    1930-8876
  • Print_ISBN
    978-1-4244-1123-8
  • Electronic_ISBN
    1930-8876
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2007.4430959
  • Filename
    4430959