Title :
Design improvement of RF 3D MIM damascene capacitor
Author :
Capraro, S. ; Bermond, C. ; Vo, T.T. ; Piquet, J. ; Fléchet, B. ; Thomas, M. ; Farcy, A. ; Torres, J. ; Cremer, S. ; Guichard, E. ; Haen, A.
Author_Institution :
Savoie Univ., Le Bourget
Abstract :
High frequency characterizations and simulations of 3D damascene metal-insulator-metal (MIM) capacitors are presented. We focused on the impact of the design on the performance of integrated capacitors. Results showed that properties of MIM capacitor get improved with specific design recommendations on electrodes shape.
Keywords :
MIM devices; capacitors; RF 3D MIM damascene capacitor; metal-insulator-metal capacitors; Capacitance; Dielectrics; Electrodes; Fingers; Hafnium; Integrated circuit reliability; MIM capacitors; Metal-insulator structures; Radio frequency; Shape;
Conference_Titel :
Solid State Device Research Conference, 2007. ESSDERC 2007. 37th European
Conference_Location :
Munich
Print_ISBN :
978-1-4244-1123-8
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2007.4430961
