A micro X-Y-/spl theta/ conveyor by superconducting magnetic levitation

The design and characteristics of a micro X-Y-/spl theta/ conveyor by superconducting magnetic levitation are reported. This actuator consists of three parts: a high temperature superconductor (HTSC) of 25 mm in diameter and 2 mm thick; a stator layer made by patterned electrodes; and a slider (3/spl times/3/spl times/1.1 mm/sup 3/) with four permanent magnets of 1/spl times/1/spl times/1 mm/sup 3/ each. We can control the position of the slider by operating the current of patterned electrodes. The linear stepping actuation has been previously achieved. In this study, the linear and rotating motion of the slider is reported. The continuous linear actuation and rotation are also achieved by controlling the duty ratio of 1 kHz square pulse current between the two adjacent electrodes.<>