Title :
An Integrated Silicon Micromechanical Interferometer
Author :
Vadekar, A. ; Huang, W.-P. ; Nathan, A.
Author_Institution :
University of Waterloo, Canada
Keywords :
Electromagnetic waveguides; Etching; Integrated optics; Micromechanical devices; Optical interferometry; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Silicon;
Conference_Titel :
Optical Fiber Sensors Conference, 1992. 8th
Print_ISBN :
0-7803-0518-3
DOI :
10.1109/OFS.1992.763030
