Electrothermal tuning and SNR of nanoelectromechanical resonators

Author

Jun, Seong Chan ; Baik, C.W. ; Kim, S.I. ; Kim, J.M. ; Kim, H. Jin ; Huang, X.M.H. ; Hone, J.

Author_Institution

Samsung Adv. Inst. of Technol., Yongin

fYear

2007

fDate

11-13 Sept. 2007

Firstpage

434

Lastpage

437

Abstract

Effects of electrothermal tuning mechanisms for nanoelectromechnical resonators are demonstrated. Voltages induced by oscillation of Al/SiC nanoresonators in a moderate magnetic filed are measured using a room-temperature tabletop setup in moderate vacuum. The dynamic range as well as the resonance frequency of the resonator can be reversibly controlled by electrothermal tuning using DC voltage. This paper presents experimental results on the resonance frequency, Q factor and dynamic range during the electrothermal tuning. As the input DC power increases, Q factor decreases due to the decrease in the resonance frequency, and SNR decreases due to the reduced amplitude or increased noise.

Keywords

aluminium; micromechanical resonators; nanotechnology; silicon compounds; tuning; Al; DC voltage; Q factor; SNR; SiC; electrothermal tuning; nanoelectromechanical resonator; nanoresonator; oscillation; resonance frequency; Dynamic range; Electrothermal effects; Magnetic resonance; Noise reduction; Q factor; Resonant frequency; Signal to noise ratio; Silicon carbide; Tuning; Voltage control;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Device Research Conference, 2007. ESSDERC 2007. 37th European

Conference_Location

Munich

ISSN

1930-8876

Print_ISBN

978-1-4244-1123-8

Electronic_ISBN

1930-8876

Type

conf

DOI

10.1109/ESSDERC.2007.4430971

Filename

4430971