Title :
Analysis of junction leakage in advanced germanium P+/n junctions
Author :
Eneman, G. ; Casain, O. Sicart i ; Simoen, E. ; Brunco, D.P. ; De Jaeger, B. ; Satta, A. ; Nicholas, G. ; Claeys, C. ; Meuris, M. ; Heyns, M.M.
Author_Institution :
IMEC, Leuven
Abstract :
We analysed heavily doped p+/n junctions in germanium, and found that the halos in this work provide a tradeoff between transistor channel control and junction leakage. Temperature-dependent leakage measurements show that either trap-assisted tunneling (TAT) or band-to-band-tunneling (BTBT) are the dominant leakage mechanisms for junctions with halos, (junction doping above ~ 1018 cm-3). Further, perimeter leakage data at/near room temperature for these junctions are consistent with the Hurckx model for TAT. At lower doping levels (no Halo), leakages are significantly lower and correspond to a shockley-read-hall (SRH) mechanism at/near room temperature and a standard diffusion current mechanism for temperatures above ~ 75degC.
Keywords :
electrical faults; elemental semiconductors; germanium; p-n junctions; semiconductor doping; Ge; Hurckx model; band to band tunneling; germanium p+/n junctions; junction leakage; temperature dependent leakage measurements; transistor channel control; trap assisted tunneling; Annealing; Doping; Germanium; Implants; Nitrogen; Semiconductor process modeling; Silicon; Temperature; Threshold voltage; Tunneling;
Conference_Titel :
Solid State Device Research Conference, 2007. ESSDERC 2007. 37th European
Conference_Location :
Munich
Print_ISBN :
978-1-4244-1123-8
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2007.4430976