Title :
Mega-Challenges for Nano-Silicon Technology
Author :
Chen, Tze-chiang T C
Author_Institution :
IBM Fellow, VP of Science and Technology, T. J. Watson Research Center, IBM Research Divison
Keywords :
Computer architecture; High performance computing; Lithography; Mass production; Materials science and technology; Moore´s Law; Nanotechnology; Power dissipation; Silicon; Technological innovation;
Conference_Titel :
Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
Print_ISBN :
1-4244-0077-5
DOI :
10.1109/NANO.2006.247552