Title :
RF MEMS based monolithic quasi-optical control grid arrays
Author :
Zhang, W-K. ; Domier, C.W. ; Luhmann, N.C., Jr.
Author_Institution :
Dept. of Appl. Sci., California Univ., Davis, CA, USA
Abstract :
RF micro-electro-mechanical systems (MEMS) switches, which are suitable for operation at microwave and millimeter wave frequencies, have been designed, fabricated and characterized. Integration of quasi-optical grid array technology with MEMS switch technology has resulted in numerous applications, including beam control arrays and mechanically tunable structures
Keywords :
micromechanical devices; microwave switches; semiconductor switches; MEMS switches; RF MEMS; beam control arrays; mechanically tunable structures; microwave frequencies; millimeter wave frequencies; quasi-optical control grid arrays; Biomembranes; Capacitance; Contacts; Control systems; Dielectric substrates; Micromechanical devices; Microswitches; Millimeter wave technology; Radiofrequency microelectromechanical systems; Switches;
Conference_Titel :
Microwave and Millimeter Wave Technology, 2000, 2nd International Conference on. ICMMT 2000
Conference_Location :
Beijing
Print_ISBN :
0-7803-5743-4
DOI :
10.1109/ICMMT.2000.895672
