Title :
The study of modeling and controlling for evaporation source in vacuum coating
Author :
Li, Yanzhe ; Fan, Duowang ; Yang, Shuben ; Kong, Linggang ; Teng, Qingfang
Author_Institution :
Educ. Minist. Key Lab. of Opt-Electron. Technol. & Intell. Control, LanZhou Jiaotong Univ., Lanzhou, China
Abstract :
According to energy conversation and thermodynamics theory, the transfer function model of evaporation source in vacuum coating can be built up. With respect to the problem that parameters of evaporation source change greatly, the conventional PID control hardly ensures stability of system, manpower intervention is largely need during coating process, and the quality of coating film is unstable, this paper suggests a method using the variables of deviation and deviation changes to distinguish closed-loop system stability. Based on this, a control method of the PI parameters self-tuning real-time online by fuzzy is introduced. The simulation results show that the evaporation source control method of the PI parameters self-tuning real-time online by fuzzy has well control effectiveness in evaporation source closed-loop system stability.
Keywords :
closed loop systems; coating techniques; fuzzy control; stability; three-term control; transfer functions; vacuum control; PI parameters; PID control; closed-loop system; energy conversation; evaporation source control; fuzzy control; system stability; thermodynamics theory; transfer function model; vacuum coating; Coatings; Control systems; Elementary particle vacuum; Fuzzy control; Real time systems; Stability; Thermal variables control; Thermodynamics; Three-term control; Transfer functions; Closed-Loop System Stability; Evaporation Source; Fuzzy; Modeling; PI;
Conference_Titel :
Control and Decision Conference, 2009. CCDC '09. Chinese
Conference_Location :
Guilin
Print_ISBN :
978-1-4244-2722-2
Electronic_ISBN :
978-1-4244-2723-9
DOI :
10.1109/CCDC.2009.5191901
