DocumentCode :
2782667
Title :
Novel thin film titanium nitride micro-electrodes with excellent charge transfer capability for cell stimulation and sensing applications
Author :
Janders, M. ; Egert, U. ; Stelzle, M. ; Nisch, W.
Author_Institution :
Naturwissenschaftliches und Med. Inst., Reutlingen, Germany
Volume :
1
fYear :
1996
fDate :
31 Oct-3 Nov 1996
Firstpage :
245
Abstract :
Microelectrodes with high specific charge transfer capability are an important prerequisite for high resolution stimulation, and recording of neuronal and muscular tissue. Novel thin film titanium nitride (TiN) microelectrodes were fabricated onto a microelectrode array by reactive sputtering in a nitrogen/argon atmosphere. The electrodes showed excellent charge transfer capacity of 40 mC/cm2 and low ac-impedance along with high pulse stability. Scanning electron microscopy revealed a regular columnar morphology providing for a large internal surface area. With respect to their electrical and mechanical properties the TiN electrodes proved superior to electrodes produced by anodic oxidation of iridium. In this type of iridium oxide irregular cracks formed probably due to the high density ratio between metal and oxide. Furthermore, in spite of high charge capacity at very low frequencies (Qcap) the iridium oxide electrodes exhibited poor safe charge injection limit under pulsing conditions (Qinj )
Keywords :
bioelectric phenomena; biomedical equipment; microelectrodes; prosthetics; sputter deposition; surface topography; thin film devices; titanium compounds; TiN; cell stimulation; charge transfer capability; high pulse stability; high resolution stimulation; in vitro monitoring; large internal surface area; low AC-impedance; microelectrode array; muscular tissue; neural prostheses; neuronal tissue; reactive sputtering; regular columnar morphology; scanning electron microscopy; sensing applications; thin film microelectrodes; Argon; Atmosphere; Charge transfer; Electrodes; Microelectrodes; Nitrogen; Sputtering; Tin; Titanium; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Engineering in Medicine and Biology Society, 1996. Bridging Disciplines for Biomedicine. Proceedings of the 18th Annual International Conference of the IEEE
Conference_Location :
Amsterdam
Print_ISBN :
0-7803-3811-1
Type :
conf
DOI :
10.1109/IEMBS.1996.656936
Filename :
656936
Link To Document :
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