Title :
Quantum Mechanical Treatment of Si-O Bond Breakage in Silica Under Time Dependent Dielectric Breakdown Testing
Author_Institution :
Silicon Technol. Dev., Texas Instruments, Dallas, TX
Abstract :
Using a generalized Mie-Gruneisen bonding potential, a quantum mechanical treatment (WKB method) for Si-O bond breakage in silica is presented under the conditions of high electric field, hole injection and hydrogen release. The full spectrum of bound-state energy eigenvalues is used to calculate the transmission probability whereby bond breakage occurs when the Si-ion goes from 4-fold to 3-fold coordination. When this full spectrum of bound-state energy eigenvalues is considered, it is shown that, due to the mass of the Si-ion and the width of the potential energy barrier separating the 4-fold and 3-fold coordinated bonding positions, the tunneling probability is relatively small and thus the transmission probability is described well by thermionic emission. It is further shown that stretched bonds, hole capture and hydrogen release can all have a significant impact on the barrier height and thus greatly impact the transmission probability.
Keywords :
bonding processes; electric breakdown; elemental semiconductors; silicon; Si; Si-O bond breakage; anode hole injection; bound-state energy eigenvalues; generalized Mie-Gruneisen bonding potential; high electric field; hole capture; hydrogen release; potential energy barrier; quantum mechanical treatment; silica; stretched bonds; thermionic emission; time dependent dielectric breakdown testing; transmission probability; tunneling probability; Bonding; Dielectric breakdown; Eigenvalues and eigenfunctions; Hydrogen; Potential energy; Probability; Quantum mechanics; Silicon compounds; Testing; Tunneling; Anode Hole Injection; Hydrogen Release; Mie-Grÿneisen Potential; TDDB; WKB;
Conference_Titel :
Reliability physics symposium, 2007. proceedings. 45th annual. ieee international
Conference_Location :
Phoenix, AZ
Print_ISBN :
1-4244-0919-5
Electronic_ISBN :
1-4244-0919-5
DOI :
10.1109/RELPHY.2007.369893