Title :
Inorganic materials solution for multi-chip modules and high speed multi-layer hybrids
Author :
Shorthouse, G. ; Berzins, A. ; Wardell, K. ; Smythe, J. ; Goodfellow, D.
Author_Institution :
Johnson Matthey Technology Centre
Keywords :
Conducting materials; Conductive films; Dielectric losses; Dielectric thin films; Etching; Gold; Inorganic materials; Integrated circuit interconnections; Space technology; Thick films;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1992. IEMT 1992. 12th International
Print_ISBN :
0-7803-0629-5
DOI :
10.1109/IEMT.1992.763413
