Design of MEMS millimeter-wave phase shifters

Author

Shouzheng, Zhu ; Ying, Wang ; Guanglong, Wu ; Zongsheng, Lai

Author_Institution

Dept. of Electr. Eng., East China Normal Univ., Shanghai, China

fYear

2000

fDate

2000

Firstpage

498

Lastpage

501

Abstract

The design of the MEMS millimeter-wave phase shifters for a millimeter-wave phased antenna array is given in this paper. The MEMS phase shifter has the advantages of small volume, light weight, wide frequency-band, low insertion loss, excellent reliability, easy integration with microwave circuits, and so on. A quasi-static numerical-analysis method together with microwave network theory are used to analyze and design the MEMS millimeter-wave phase shifter. A new structure of a MEMS phase shifter with better electrical characteristics is finally presented

Keywords

antenna accessories; antenna phased arrays; coplanar waveguide components; micromechanical devices; millimetre wave antenna arrays; millimetre wave phase shifters; CPW; EHF; MEMS MM-wave phase shifters; MEMS metal bridges; MM-wave phased antenna array; electrical characteristics; light weight design; microwave network theory; millimeter-wave phase shifters; quasi-static numerical-analysis method; reliability; wide frequency-band; Antenna arrays; Frequency; Insertion loss; Integrated circuit reliability; Micromechanical devices; Microwave circuits; Millimeter wave circuits; Millimeter wave technology; Phase shifters; Phased arrays;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Millimeter Wave Technology, 2000, 2nd International Conference on. ICMMT 2000

Conference_Location

Beijing

Print_ISBN

0-7803-5743-4

Type

conf

DOI

10.1109/ICMMT.2000.895730

Filename

895730