DocumentCode :
2783530
Title :
MCM-D via generation by scanning laser ablation
Author :
Tessier, T.G. ; Hoffman, W.F. ; Chandler, G.
Author_Institution :
Motorola corporate Manufacturing Research center (CMRC)
fYear :
1992
fDate :
1992
Firstpage :
328
Lastpage :
335
Keywords :
Costs; Dielectric substrates; Integrated circuit interconnections; Laser ablation; Laser modes; Optical device fabrication; Polyimides; Polymers; Power lasers; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1992. IEMT 1992. 12th International
Print_ISBN :
0-7803-0629-5
Type :
conf
DOI :
10.1109/IEMT.1992.763426
Filename :
763426
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2783530
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